SICO - Silicon Boat / Tube
Silicon is the purest and most researched commercially available material. In a purity scale, it is 4 classes purer than quartz and 7 classes purer than silicon carbide.
Alkali and heavy metal contaminants are deduced to the low ppb-range. Silicon has a working temperature of 1350 °C and ever after longer use and high temperatures it will not become porous or deform.
The thermal expansion properties are the same as for wafers.
In comparison to other materials used in the semiconductor industry, silicon guarantees highest purity while processing. Therefore silicon is the optimal material for semiconductor processes.
Silicon has a smooth surface. Special surface cleaning and quality end control ensure no particle emission during the semiconductor process.
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CS- CLEANSORB Stand Alone系列
CLEANSORB Stand Alone系列
排氣淨化器
專為小型研究室設計的獨立藥桶，無需氣櫃和或監控設備。
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CS - CLEANSORB LABLINE系列
CLEANSORB LABLINE系列
適用於研究室的排氣淨化器，
安裝在小型櫃子內的迷你型CLEANSORB乾式吸收劑桶。被動操作的LABLINE設備永遠處於就位狀態，不需要在每台新設備運行之前啟動。因此，它非常適用於無規律性的研發項目。我們的產品具有更長的吸收時間，往往長達數年。
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CS - CLEANSORB BASE LINE系列
CLEANSORB BASE LINE系列
系列是一種不需要控制電子的智慧設計。它是一種手操作的堅固基本模型，為對成本敏感性高的應用方面的最佳選擇
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CS - CLEANSORB SC系列
CLEANSORB SC系列
單桶排氣淨化器
這是最適用於實驗和大規模生產環境用的廢氣清除的標准設備。其操作簡單，操作員只需少許培訓即可操作。安裝設施的供應要求極少，幾乎全面保修。
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CS - CLEANSORB DC系列
CLEANSORB DC系列
雙桶排氣淨化器
雙桶("DC")的設計可帶來無間斷的運行：在一桶被拆下重新裝填時，另一桶可以繼續操作使用，使該系統保持著100%可靠性的記錄，即使是在最嚴酷的工藝應用條件下也如此。 CS CLEAN SYSTEMS保證17000小時的MTBF。
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Kojundo Chemical - TEMAH / TEMAZ (High-K)
Chemical Vapor Deposition (CVD)
is a chemical process of making a required materials into a thin film by vaporizing the material and
by utilizing chemical reactions in the gas phase at the surface of the substrate
under various pressure conditions.
Volatile compounds are used as CVD materials and metal alkoxides are one of the representative CVD materials.
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Toray - High-Speed Wafer Defect Inspection System
7000R contributes to the product yield improvement in the front-process as an In-Line process monitor equipment.
As well as the final externals process , the process control of the chip unit becomes possible.
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TaeHan Global - Magnetnic Seal New Design & Repair
Application for magnetic fluid seal
-. Wafer growing equipment.
-. Semiconductor process equipment
(Epitaxy, Diffusion, CVD, PVD, Implantation etc)
-. LCD process equipment.
-. Solar cell.
-. Vacuum Robot.
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Lorex - Piezocon® Acoustical Gas Concentration Sensor / Controller
Piezocon Gas Sensor for Semiconductor CVD
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ADMAP - Ultra High-Purity SiC Wafer
SiC Dummy Wafer / SiC Fin / Plate for Semiconductor Diffusion
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JIWONTECH - QNST / QPST / Cleaning Towel
QNST/QPST/Cleaning Towel for Semiconductor Diffusion
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